HP Gas

Product List

Etching and Cleaning Gases

Type Chemical Formula Update
High-Purity FC-14 Catalogue PDF (4MB) CF4 2001.12.17
Clean Gas FC-14 Catalogue PDF (4MB) 2002.9.3
High-Purity FC-116 Catalogue PDF (4MB) C2F6 2001.12.17
Clean Gas FC-116 Catalogue PDF (4MB) 2001.12.17
High-Purity HFC-23 Catalogue PDF (4MB) CHF3 2001.12.17
Clean Gas HFC-23 Catalogue PDF (4MB) 2001.12.17
High-Purity HFC-32 Catalogue PDF (4MB) CH2F2 2001.12.17
Clean Gas HFC-32 Catalogue PDF (4MB) 2001.12.17
High-Purity FC-C318 Catalogue PDF (4MB) C4F8 2001.12.17
Clean Gas FC-C318 Catalogue PDF (4MB) 2001.12.17
High-Purity FC-218 Catalogue PDF (4MB) C3F8 2001.12.17
High-Purity FC-2316 Catalogue PDF (4MB) C4F6 2004.7.6
High-Purity Boron Trichloride BCl3 2001.12.17
Clean Gas Boron Trichloride 2001.12.17
High-Purity Chlorine Catalogue PDF (4MB) Cl2 2001.12.17
Clean Gas Chlorine Catalogue PDF (4MB) 2001.12.17
High-Purity Hydrogen Chloride Catalogue PDF (4MB) HBr 2001.12.17
Clean Gas Hydrogen Chloride Catalogue PDF (4MB) 2001.12.17
High-Purity Hydrogen Bromide SF6 2001.12.17
Clean Gas Hydrogen Bromide 2001.12.17
High-Purity Sulfur Hexafluoride Catalogue PDF (4MB) NF3 2001.12.17

Epitaxial and Film-Forming Gases

Type Chemical Formula Update
H-PET Ta(OC2H5) 2004.7.6
High-Purity Ammonia Catalogue PDF (4MB) NH3 2001.12.17
High-Purity Nitrous Oxide Catalogue PDF (4MB) N2O 2001.12.17
Clean Gas Nitrous Oxide Catalogue PDF (4MB) 2001.12.17