HP Gas

Clean Gas FC-116 (Clean Gas Hexafluoroethane)

Technical Data

Appearance: Colorless and odorless gas UN Number: 2193
CAS Number: 76-16-4 Liquefied gas

* Refer to MSDS for detailed information on the properties and safety of the product.


Purity vol% Min. 99.999
O2+Ar volppm Max. 2
N2 volppm Max. 10
CH4 volppm Max. 0.7
CO volppm Max. 0.7
CO2 volppm Max. 0.7
H2O volppm Max. 3.0
Acids as HF volppm Max. 0.1
CF4 volppm Max. 2.0
Other fluorocarbons volppm Max. 5.0
Particle Not smaller than 0.1 micrometer Max. 60/C.F.
Clean Gas FC-116 (Clean Gas Hexafluoroethane)


Item 10L cylinder 47L cylinder
Size Inside diameter 140mm 232mm
Height (to the neck portion) 850mm 1370mm
Height (with a protective cap) * 1000mm 1520mm
Loading weight 8kg 35, 40kg
Material Manganese steel (Clean-S-treated)

* Estimated values for when a standard valve is mounted on a standard cylinder. The accuracy of these values is not guaranteed.


Nozzle size Ø22 mm X 14 right-hand threads
Material SUS316L

Physical & Chemical Properties

Item Unit Data
Chemical formula C2F6
Molecular weight 138.01
Boiling point °C -78.15
°F -108.8
Melting point °C -101
Specific gravity (air: 1) 4.823
Liquid density (0°C, saturated liquid) kg/L 1.109
Gas density g/L
Critical temperature °C 19.65
Critical pressure MPa 3.2
kg/cm2 32.6
Flammability Not applicable
Toxicity Not applicable
Latent heat of vaporization (0°C, 1013MPa) kJ/kg 117.0
Maximum permissible concentration (ACGIH) ppm
Explosive limit (in air)

Temperature – Vapor Pressure Curve

Clean Gas FC-116 (Clean Gas Hexafluoroethane)