Main Product Category Title
Product Title
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Features
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Process
Process content
Characteristics (Typical Values)
| Item | Unit | HS-H635 | HS-T605 | HS-T815 | |
|---|---|---|---|---|---|
| Use | -- | for Cu | for TaN | Non selective | |
| Features | -- | Abrasive free like High removal @low down force | High selective | Non selective | |
| Removal Rate | Cu | A/min. | 8,000 | 250 | 480 |
| TaN | 40 | 650 | 750 | ||
| SiO2 | -- | <50 | 650 | ||
| SiOC | -- | <50 | 200 | ||