Chemicals and HPM Products
Espacer
Product Information
Electrification Dissipating Material
Espacer is an aqueous solution without any organic solvent. It’s a weak acidic solution, which is applicable for both type of resist.
A thin film of Espacer is highly conductive, therefore it solves problems related to positional errors during electron-beam (EB) lithography processes.
Grade Selection
Non Chemical Amplified | Chemical Amplified | ||||
---|---|---|---|---|---|
Positive Resist |
Positive Resist |
Negative Resist |
Positive Resist |
Negative Resist |
|
Espacer | ZEP520 | PMMA | FOC-1X | FEP-71 | SAL601 |
300Z | ✓ | ✓ | |||
300HX02 | ✓ | ||||
300AX01 | ✓ | ✓ |