Photosensitive Insulation Coating
AH Series
AH series is photosensitive and low temperature curable insulation coating. It can be patterned via photolithography and provides excellent film properties even by low temperature cure.
Features
- Positive-tone photosensitive and developable by 2.38% TMAH solution as an aqueous developer
- Low temperature curable (≦200°C)
- Excellent film properties
- Suitable for insulation layers in semiconductor packages
Characteristics (Typical Values)
| Items | Unit | AH Series |
|---|---|---|
| Applicable film thickness | μm | 2~20 |
| Exposure dose* | mJ/cm2 | 400 |
| Cure temperature | °C | 180~200 |
| Glass transition temperature | °C | >200 |
| Young’s modulus | GPa | 2.0 |
| Elongation | % | 50 |
| Coefficient of thermal expansion | °C | 58 |
| Residual stress | MPa | 20 |
Cross Section of AH Series after Cure
Product line-up applicable for various pattern profiles after cure
Application Example of AH Series for Redistribution Insulation Layers on WL-CSP
Application Example of AH Series for Redistribution Insulation Layers on WL-CSP