HP Gas
Clean Gas FC-14 (Clean Gas Tetrafluoromethane)
Properties and Classification
| Appearance: Colorless and odorless gas | UN Number: 1982 |
| CAS Number: 75-73-0 | Compressed gas |
* Refer to MSDS for detailed information on the properties and safety of the product.
Specification
| Purity | vol% | Min. 99.9997 |
|---|---|---|
| O2+Ar | volppm | Max. 2.0 |
| N2 | volppm | Max. 10 |
| CH4 | volppm | Max. 0.5 |
| CO | volppm | Max. 0.5 |
| CO2 | volppm | Max. 0.7 |
| H2O | volppm | Max. 0.5 |
| Acids as HF | volppm | Max. 0.1 |
| SF6 | volppm | Max. 0.2 |
| CHF3 | volppm | Max. 0.6 |
| Other fluorocarbons | volppm | Max. 2.0 |

Cylinder
| Item | 10L cylinder | 47L cylinder | |
|---|---|---|---|
| Size | Inside diameter | 140mm | 232mm |
| Height (to the neck portion) | 850mm | 1370mm | |
| Height (with a protective cap) * | 1000mm | 1520mm | |
| Valve nozzle height (center) * | 875mm | 1380mm | |
| Loading weight | 7kg | 30kg, 33kg | |
| Material | Manganese steel | ||
* Estimated values for when a standard valve is mounted on a standard cylinder. The accuracy of these values is not guaranteed.
Valve
| Material | SUS316L |
Physical & Chemical Properties
| Item | Unit | Data |
|---|---|---|
| Chemical formula | CF4 | |
| Molecular weight | 88.01 | |
| Boiling point | °C | -128.0 |
| Melting point | °C | -184 |
| Specific gravity (air: 1) | 3.04 | |
| Liquid density | kg/L | 1.663 |
| Gas density (127.9ßÜC, saturated liquid) | g/L | 7.666 |
| Critical temperature | °C | -45.55 |
| Critical pressure | MPa | 3.74 |
| kg/cm2 | 38.1 | |
| Flammability | Not applicable | |
| Toxicity | Not applicable | |
| Latent heat of vaporization (0°C, 1013MPa) | kJ/kg | 135.9 |
| Maximum permissible concentration (ACGIH) | ppm | – |
| Explosive limit (in air) | – |
Temperature – Vapor Pressure Curve

